Earth and Planetary Science
EPS Atmosphere, Oceans, and Climate

Scanning Electron Microscope (SEM)

The Zeiss EVO-10 Variable Vacuum SEM is available for general research and can be used for both secondary electron (SE) and backscattered electron (BE) imaging. Qualitative chemicalanalyses can be performed with a energy-dispersive X-ray detector (EDS). The SEM is also used for electron backscatter pattern (EBSP) and orientation imaging (OIM) as applied to analysis of preferred orientation.

Common Uses: Excellent for imaging surface morphology (texture), crystal structure, orientation and composition of samples in both thin section and free-standing mounts. For scheduling, please contact Tim Teague (tteague@berkeley.edu).

SEM Lab details:

  • Zeiss EVO Variable Vacuum Instrument -10
  • Tungsten filament
  • Large sample chamber with 9 position sample holder.
  • Variable pressure capable
  • Detectors:Secondary electron; Secondary electron VP; Backscatter electron
  • EDAX system for chemical analysis with silicon drift detector and thin window (detects down to Boron).
  • Electron Backscatter diffraction (EBSD) for crystal orientation measurement.
  • Carbon evaporator
  • Gold sputter coater
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Contact Name: 
Tim Teague
510-642-3514