Scanning Electron Microscope (SEM)

The Zeiss EVO-10 Variable Vacuum SEM is available for general research and can be used for both secondary electron (SE) and backscattered electron (BE) imaging. Qualitative chemicalanalyses can be performed with a energy-dispersive X-ray detector (EDS). The SEM is also used for electron backscatter pattern (EBSP) and orientation imaging (OIM) as applied to analysis of preferred orientation.

Common Uses: Excellent for imaging surface morphology (texture), crystal structure, orientation and composition of samples in both thin section and free-standing mounts. For scheduling, please contact Tim Teague (tteague@berkeley.edu).

SEM Lab details:

• Zeiss EVO Variable Vacuum Instrument -10
• Tungsten filament
• Large sample chamber with 9 position sample holder.
• Variable pressure capable
• Detectors:Secondary electron; Secondary electron VP; Backscatter electron
• EDAX system for chemical analysis with silicon drift detector and thin window (detects down to Boron).
• Electron Backscatter diffraction (EBSD) for crystal orientation measurement.
• Carbon evaporator
• Gold sputter coater